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PUBLICATIONS

Effect of Annealing Conditions on Precipitate and Defect Evolution in Oxygen Implanted SOI Material

Published

Author(s)

S. J. Krause, S. Visitserngtrakul, B. F. Cordts, Peter Roitman
Proceedings Title
Proc., 1989 IEEE SOS/SOI Technology Conference
Conference Dates
October 3-5, 1989
Conference Location
Stateline, NV, USA
Pub Type
Conferences

Citation

Krause, S. , Visitserngtrakul, S. , Cordts, B. and Roitman, P. (1989), Effect of Annealing Conditions on Precipitate and Defect Evolution in Oxygen Implanted SOI Material, Proc., 1989 IEEE SOS/SOI Technology Conference, Stateline, NV, USA (Accessed November 7, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created December 30, 1989, Updated October 12, 2021
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