A Model Database for Determining Dopant Profiles from Scanning Capacitance Microscope Measurements

Jay F. Marchiando; Joseph Kopanski; J R. Lowney

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PUBLICATIONS

A Model Database for Determining Dopant Profiles from Scanning Capacitance Microscope Measurements

Published

February 1, 1998

Author(s)

Jay F. Marchiando, Joseph Kopanski, J R. Lowney

Citation

Journal of Vacuum Science and Technology

Volume

B. 16

Issue

Pub Type

Journals

Citation

Marchiando, J. , Kopanski, J. and Lowney, J. (1998), A Model Database for Determining Dopant Profiles from Scanning Capacitance Microscope Measurements, Journal of Vacuum Science and Technology (Accessed June 25, 2026)

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Created January 31, 1998, Updated October 12, 2021

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