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PUBLICATIONS

Effect of Nitrogen Ambients During High-Temperature SIMOX Annealing

Published

Author(s)

Peter Roitman, Santos D. Mayo, David S. Simons, S. J. Krause, J Park, J. H. Lee, D. Venables, Patrick M. Lenahan, J. F. Conley
Proceedings Title
Proc., Electrochemical Society International Symposium on SOI Technology and Devices
Conference Dates
May 22-27, 1994
Conference Location
San Francisco, CA, USA
Pub Type
Conferences

Citation

Roitman, P. , Mayo, S. , Simons, D. , Krause, S. , Park, J. , Lee, J. , Venables, D. , Lenahan, P. and Conley, J. (1994), Effect of Nitrogen Ambients During High-Temperature SIMOX Annealing, Proc., Electrochemical Society International Symposium on SOI Technology and Devices, San Francisco, CA, USA (Accessed October 14, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created December 30, 1994, Updated October 12, 2021
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