Postek, M.
, Larrabee, R.
, Keery, W.
and Marx, E.
(1991),
The Application of Transmission Electron Detection to X-ray Mask Calibrations and Inspection, Proc. Intl. Soc. for Optical Engineering (SPIE), Integrated Circuit Metrology, Inspection, and Process Control V, San Jose, CA, USA
(Accessed April 29, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
The Application of Transmission Electron Detection to X-ray Mask Calibrations and Inspection
Published
Author(s)
, , , E Marx
Proceedings Title
Proc. Intl. Soc. for Optical Engineering (SPIE), Integrated Circuit Metrology, Inspection, and Process Control V
Volume
1464
Conference Dates
March 4-5, 1991
Conference Location
San Jose, CA, USA
Pub Type
Conferences
Citation
Created December 30, 1991, Updated October 12, 2021