Martinez, J.
and Knight, S.
(2004),
Semiconductor Metrology Programs at NIST, Micro and Nano Technology in PIM 2004
New Industrial Technologies, Manaus, 1, BR (Accessed September 5, 2026)
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Semiconductor Metrology Programs at NIST
Published
Author(s)
,
Abstract
The history of the National Bureau of Standards/National Institute of Standards and Technology (NBS/NIST) will be briefly reviewed emphasizing the creation of the National Semiconductor Metrology Program (NSMP) and the Office of Microelectronics Programs (OMP). The organization of the projects supported by the OMP will be presented, and some of the most recent accomplishments will be described.Conference Dates
September 15-18, 2004
Conference Location
Manaus, 1, BR
Conference Title
Micro and Nano Technology in PIM 2004
New Industrial Technologies
New Industrial Technologies
Pub Type
Conferences
Keywords
NIST, OMP, semiconductors
Citation
Issues
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Created September 14, 2004, Updated October 12, 2021