TY  - CONF
AU  - Joaquin Martinez
AU  - Stephen Knight
C2  - Micro and Nano Technology in PIM 2004
New Industrial Technologies, Manaus, 1, BR
DA  - 2004-09-15 00:09:00
LA  - en
PB  - Micro and Nano Technology in PIM 2004
New Industrial Technologies, Manaus, 1, BR
PY  - 2004
TI  - Semiconductor Metrology Programs at NIST
ER  -