@conference{769171,
  author = {Joaquin Martinez and Stephen Knight},
  title = {Semiconductor Metrology Programs at NIST},
  year = {2004},
  month = {2004-09-15 00:09:00},
  publisher = {Micro and Nano Technology in PIM 2004
New Industrial Technologies, Manaus, 1, BR},
  language = {en},
}