Sadana, D.
, Lasky, J.
, Hovel, H.
, Petrillo, K.
and Roitman, P.
(1994),
Nano-Defects In Commercial Bonded SOI and SIMOX, Proc., 1994 IEEE SOI Conference, Nantucket, MA, USA (Accessed October 1, 2026)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Nano-Defects In Commercial Bonded SOI and SIMOX
Published
Author(s)
D. K. Sadana, J. Lasky, H. J. Hovel, K. Petrillo,
Proceedings Title
Proc., 1994 IEEE SOI Conference
Conference Dates
October 4-6, 1994
Conference Location
Nantucket, MA, USA
Pub Type
Conferences
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact [email protected].
Created December 30, 1994, Updated October 12, 2021