@conference{766076,
  author = {D. Sadana and J. Lasky and H. Hovel and K. Petrillo and Peter Roitman},
  title = {Nano-Defects In Commercial Bonded SOI and SIMOX},
  year = {1994},
  month = {1994-12-31 00:12:00},
  publisher = {Proc.,  1994 IEEE SOI Conference, Nantucket, MA, USA},
  language = {en},
}