Kopanski, J.
, Marchiando, J.
and Alvis, R.
(1997),
Practical Metrology Aspects of Scanning Capacitance Microscopy for Silicon 2-D Dopant Profiling, Condensed version, Extended Abstracts of the Electrochemical Society, Montreal, 1, CA
(Accessed April 19, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Practical Metrology Aspects of Scanning Capacitance Microscopy for Silicon 2-D Dopant Profiling, Condensed version
Published
Author(s)
, , R. Alvis
Proceedings Title
Extended Abstracts of the Electrochemical Society
Conference Dates
May 4-9, 1997
Conference Location
Montreal, 1, CA
Pub Type
Conferences
Citation
Created December 30, 1997, Updated October 12, 2021