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PUBLICATIONS

Electrical Linewidth Test Structures Patterned in (100) Silicon-on-Insulator for Use as CD Standards

Published

Author(s)

Michael W. Cresswell, John E. Bonevich, Richard A. Allen, Nadine Guillaume, Lucille A. Giannuzzi, Sarah C. Everist, Christine E. Murabito, Patrick J. Shea, Loren W. Linholm
Citation
IEEE Transactions on Semiconductor Manufacturing
Volume
14
Issue
4
Pub Type
Journals

Citation

Cresswell, M. , Bonevich, J. , Allen, R. , Guillaume, N. , Giannuzzi, L. , Everist, S. , Murabito, C. , Shea, P. and Linholm, L. (2001), Electrical Linewidth Test Structures Patterned in (100) Silicon-on-Insulator for Use as CD Standards, IEEE Transactions on Semiconductor Manufacturing (Accessed October 9, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created October 31, 2001, Updated October 12, 2021
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