Cresswell, M.
, Bonevich, J.
, Allen, R.
, Guillaume, N.
, Giannuzzi, L.
, Everist, S.
, Murabito, C.
, Shea, P.
and Linholm, L.
(2001),
Electrical Linewidth Test Structures Patterned in (100) Silicon-on-Insulator for Use as CD Standards, IEEE Transactions on Semiconductor Manufacturing
(Accessed May 15, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Electrical Linewidth Test Structures Patterned in (100) Silicon-on-Insulator for Use as CD Standards
Published
Author(s)
, , , , Lucille A. Giannuzzi, Sarah C. Everist, , Patrick J. Shea,
Citation
IEEE Transactions on Semiconductor Manufacturing
Volume
14
Issue
4
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created October 31, 2001, Updated October 12, 2021