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PUBLICATIONS

Electrical Test Structures Replicated in Silicon-on-Insulator Material

Published

Author(s)

Michael W. Cresswell, J. J. Sniegowski, Rathindra Ghoshtagore, Richard A. Allen, Loren W. Linholm, John S. Villarrubia
Proceedings Title
Proc. Intl. Soc. for Optical Engineering (SPIE), The International Society for Optical Engineering, Microlithography Metrology, Inspection and Process Control for Microlithography X
Volume
2725
Conference Dates
March 11-13, 1996
Conference Location
Bellingham, WA, USA
Pub Type
Conferences

Citation

Cresswell, M. , Sniegowski, J. , Ghoshtagore, R. , Allen, R. , Linholm, L. and Villarrubia, J. (1996), Electrical Test Structures Replicated in Silicon-on-Insulator Material, Proc. Intl. Soc. for Optical Engineering (SPIE), The International Society for Optical Engineering, Microlithography Metrology, Inspection and Process Control for Microlithography X, Bellingham, WA, USA (Accessed October 13, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created December 30, 1996, Updated October 12, 2021
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