Nyyssonen, D.
(1989),
Narrow-Angle Laser Scanning Microscope System for Linewidth Measurements on Wafers, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD (Accessed June 2, 2026)
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Narrow-Angle Laser Scanning Microscope System for Linewidth Measurements on Wafers
Published
Author(s)
D. Nyyssonen
Citation
NIST Interagency/Internal Report (NISTIR) -
NIST Pub Series
Pub Type
NIST Pubs
Citation
Issues
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Created March 31, 1989, Updated October 12, 2021