@misc{779561,
  author = {D. Nyyssonen},
  title = {Narrow-Angle Laser Scanning Microscope System for Linewidth Measurements on Wafers},
  year = {1989},
  month = {1989-04-01 00:04:00},
  publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}