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PUBLICATIONS

Growth and Analysis of Near Ideal Thin Films and Multilayers

Published

Author(s)

J Pedulla, R Deslattes, S Owens

Abstract

As thin film technology moves into the truly nano-scale region [
Citation
Growth and Analysis of Near Ideal Thin Films and Multilayers
Pub Weblink
http://www.nist.gov/sigmaxi/Posters98/abs/Owens.html
Pub Type
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Keywords

grazing incidence x-ray scattering GIXS, thin film technology
Manufacturing and Metrology

Citation

Pedulla, J. , Deslattes, R. and Owens, S. (1998), Growth and Analysis of Near Ideal Thin Films and Multilayers, Growth and Analysis of Near Ideal Thin Films and Multilayers, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822528, http://www.nist.gov/sigmaxi/Posters98/abs/Owens.html (Accessed October 27, 2025)

Issues

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Created February 18, 1998, Updated February 19, 2017
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