@misc{186691,
  author = {J Pedulla and R Deslattes and S Owens},
  title = {Growth and Analysis of Near Ideal Thin Films and Multilayers},
  year = {1998},
  month = {1998-02-18},
  publisher = {Growth and Analysis of Near Ideal Thin Films and Multilayers},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822528},
  language = {en},
}