Mopsik, F.
(2000),
Extended Frequency Range Dielectric Measurements of Thin Films, Review of Scientific Instruments, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851422
(Accessed May 18, 2024)
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Extended Frequency Range Dielectric Measurements of Thin Films
Published
Author(s)
Abstract
A method is described to measure the dielectric constant and loss of thin films. It employs a sample holder based on precision 50 {ohm} air line and can be used from audio frequencies to 1 GHz with a single sample. It is shown to maximize the precision available from commercial instrumentation with minimal data correction. This is confirmed by regions in which the different instruments overlap their frequency coverage.Citation
Review of Scientific Instruments
Volume
71
Issue
No. 6
Pub Type
Journals
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Keywords
dielectric constant, dielectric measurements, electronics packaging, high frequency, sample holder, thin film
Citation
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Created June 1, 2000, Updated February 17, 2017