Kinematic Modeling of a 6-Degree of Freedom Tri Stage Micro-Positioner

Published

November 1, 2001

Author(s)

Nicholas G. Dagalakis, E Amatucci

Abstract

The 6-Degree of Freedom Tri Stage Micro Positioner (6DFTSMP) can generate high accuracy, small displacement, and high-resolution motions. The moving platform of the device has six degrees (6-D) of freedom motions (translation and rotation about three orthogonal axes, X-Y-Z). The 6DFTSMP is unique because it derives its input motion from a monolithic tri-stage base plate and has struts with specially designed flexures. The 6DFTSMP capitalizes on the availability of inexpensive high quality planar micro-positioning stages for the control of its moving platform. Because the struts, which connect the planar micro positioning stages with the moving platform are oriented in a parallel mechanism fashion the in plane motion of the stages is converted into a translation and rotation about three orthogonal axes. Two experimental prototypes of the 6DFTSMP have been built and various mathematical models have been developed. A micro-position and orientation measurement sensor nest has been developed, which will be used to test various calibration and performance testing methods for this type of micro-positioners.

Proceedings Title

American Society for Precision Engineering, Annual Meeting | 16th | Proceedings of ASPE 16th Annual Meeting | ASPE

Volume

16

Conference Dates

November 10-15, 2001

Conference Title

Proceedings of the American Society for Precision Engineering

Pub Type

Conferences

Download Paper

Local Download

Keywords

flexures, kinematic, micro-positioner, model

Citation

Dagalakis, N. and Amatucci, E. (2001), Kinematic Modeling of a 6-Degree of Freedom Tri Stage Micro-Positioner, American Society for Precision Engineering, Annual Meeting | 16th | Proceedings of ASPE 16th Annual Meeting | ASPE, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823398 (Accessed October 10, 2025)