@conference{150696,
  author = {Nicholas Dagalakis and E Amatucci},
  title = {Kinematic Modeling of a 6-Degree of Freedom Tri Stage Micro-Positioner},
  year = {2001},
  number = {16},
  month = {2001-11-01},
  publisher = {American Society for Precision Engineering, Annual Meeting | 16th | Proceedings of ASPE 16th Annual Meeting | ASPE},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823398},
  language = {en},
}