TY  - CONF
AU  - Nicholas Dagalakis
AU  - E Amatucci
C2  - American Society for Precision Engineering, Annual Meeting | 16th | Proceedings of ASPE 16th Annual Meeting | ASPE
DA  - 2001-11-01
LA  - en
M1  - 16
PB  - American Society for Precision Engineering, Annual Meeting | 16th | Proceedings of ASPE 16th Annual Meeting | ASPE
PY  - 2001
TI  - Kinematic Modeling of a 6-Degree of Freedom Tri Stage Micro-Positioner
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823398
ER  -