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PUBLICATIONS

X-Ray Metrology by Diffraction and Reflectivity

Published

Author(s)

D K. Bowen, R Deslattes
Proceedings Title
2000 International Conference on Characterization and Metrology for ULSI Technology at NIST
Conference Dates
June 26-29, 2000
Conference Location
Gaithersburg, MD, USA
Conference Title
Proc. 2000 International Conference on Characterization and Metrology for ULSI Technology at NIST
Pub Type
Conferences

Citation

Bowen, D. and Deslattes, R. (2001), X-Ray Metrology by Diffraction and Reflectivity, 2000 International Conference on Characterization and Metrology for ULSI Technology at NIST , Gaithersburg, MD, USA (Accessed October 17, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created December 31, 2000, Updated October 12, 2021
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