Bowen, D.
and Deslattes, R.
(2001),
X-Ray Metrology by Diffraction and Reflectivity, 2000 International Conference on Characterization and Metrology for ULSI Technology at NIST , Gaithersburg, MD, USA (Accessed May 6, 2026)
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X-Ray Metrology by Diffraction and Reflectivity
Published
Author(s)
D K. Bowen,
Proceedings Title
2000 International Conference on Characterization and Metrology for ULSI Technology at NIST
Conference Dates
June 26-29, 2000
Conference Location
Gaithersburg, MD, USA
Conference Title
Proc. 2000 International Conference on Characterization and Metrology for ULSI Technology at NIST
Pub Type
Conferences
Citation
Issues
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Created December 31, 2000, Updated October 12, 2021