Burnett, J.
, Levine, Z.
and And, E.
(2002),
Intrinsic Birefringence in Crystalline Optical Materials for 193 nm and 157 nm Lithography, ICG Publishing , London,
(Accessed October 27, 2025)
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Intrinsic Birefringence in Crystalline Optical Materials for 193 nm and 157 nm Lithography
Published
Author(s)
John H. Burnett, , E L. And shirley
Citation
Semiconductor Fabtech 15<sup>th</sup> Edition
Publisher Info
ICG Publishing , London,
Pub Type
Books
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact [email protected].
Created January 1, 2002, Updated February 17, 2017