@book{140641,
  author = {John Burnett and Zachary Levine and E And},
  title = {Intrinsic Birefringence in Crystalline Optical Materials for 193 nm and 157 nm Lithography},
  year = {2002},
  month = {2002-01-01},
  publisher = {ICG Publishing , London, },
  language = {en},
}