U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

Superconducting Integrated Circuit Fabrication Process Utilizing Low Temperature ECR-Based PECVD SiO2 Dielectric Films

Published

Author(s)

J. E. Sauvageau, P. A. Booi, M. W. Cromar, Samuel Benz, Charles J. Burroughs, Jonathan A. Koch
Citation
IEEE Transactions on Applied Superconductivity
Volume
5
Issue
2
Pub Type
Journals
Sensors

Citation

Sauvageau, J. , Booi, P. , Cromar, M. , Benz, S. , Burroughs, C. and Koch, J. (1995), Superconducting Integrated Circuit Fabrication Process Utilizing Low Temperature ECR-Based PECVD SiO<sub>2</sub> Dielectric Films, IEEE Transactions on Applied Superconductivity (Accessed April 30, 2024)

Created May 31, 1995, Updated October 12, 2021