TY  - JOUR
AU  - J. Sauvageau
AU  - P. Booi
AU  - M. Cromar
AU  - Samuel Benz
AU  - Charles Burroughs
AU  - Jonathan Koch
C2  - IEEE Transactions on Applied Superconductivity
DA  - 1995-06-01 00:06:00
LA  - en
M1  - 5
PB  - IEEE Transactions on Applied Superconductivity
PY  - 1995
TI  - Superconducting Integrated Circuit Fabrication Process Utilizing Low Temperature ECR-Based PECVD SiO<sub>2</sub> Dielectric Films
ER  -