@article{795146,
  author = {J. Sauvageau and P. Booi and M. Cromar and Samuel Benz and Charles Burroughs and Jonathan Koch},
  title = {Superconducting Integrated Circuit Fabrication Process Utilizing Low Temperature ECR-Based PECVD SiO<sub>2</sub> Dielectric Films},
  year = {1995},
  number = {5},
  month = {1995-06-01 00:06:00},
  publisher = {IEEE Transactions on Applied Superconductivity},
  language = {en},
}