Germer, T.
, Mulholland, G.
, Kim, J.
and Ehrman, S.
(2002),
Measurement of the 100 nm NIST SRM® 1963 by Laser Surface Light Scattering, ed. by A Duparr {?} and B. Singh, Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components, Seattle, WA
(Accessed May 20, 2024)
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Measurement of the 100 nm NIST SRM® 1963 by Laser Surface Light Scattering, ed. by A Duparr {?} and B. Singh
Published
Author(s)
, G W. Mulholland, J H. Kim, S H. Ehrman
Proceedings Title
Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components
Conference Dates
July 9-11, 2002
Conference Location
Seattle, WA
Conference Title
Proc. SPIE 4779
Pub Type
Conferences
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created January 1, 2002, Updated February 17, 2017