Simons, D.
(2006),
Summary of IOS/TC 201 Standard: XIII. ISO 18114:2003-Surface Chemical Analysis-Secondary Ion Mass Spectrometry-Determination of Relative Sensitivity Factors From Ion-Implanted Reference Materials, Surface and Interface Analysis (Accessed May 6, 2026)
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Summary of IOS/TC 201 Standard: XIII. ISO 18114:2003-Surface Chemical Analysis-Secondary Ion Mass Spectrometry-Determination of Relative Sensitivity Factors From Ion-Implanted Reference Materials
Published
Author(s)
Citation
Surface and Interface Analysis
Volume
38
Issue
3
Pub Type
Journals
Keywords
ion implantation, reference material, relative sensitivity factor, RSF, SIMS
Citation
Issues
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Created January 19, 2006, Updated February 19, 2017