Higher Order Tip Effects in CD-AFM Linewidth Measurements

Published

January 1, 2007

Author(s)

Ndubuisi G. Orji, Ronald G. Dixson

Abstract

In critical dimension Atomic force microscopy (CD-AFM), a source of uncertainty is the tip.  Measurements made using a CD-AFM tip show an apparent broadening of the width. Usually the results can be approximated if the tip-width is known. In addition to tip-width, tip-shape dependent effects, also known as higher order tip effects, area contributor to the uncertainty of CD-AFM linewidth measurements, especially for undercut features and samples with relatively large sidewall roughness.  In this paper we examine the different types of CD-AFM higher order tip effects within the context of a reference measurement system and present a procedure for estimating for thiscontribution with an uncertainty of less than 1.5 nm

Citation

Measurement Science & Technology

Volume

18

Pub Type

Journals

Keywords

atomic force microscope, linewidth, reference measurement system, tip effects, uncertainty

Citation

Orji, N. and Dixson, R. (2007), Higher Order Tip Effects in CD-AFM Linewidth Measurements, Measurement Science & Technology (Accessed April 30, 2024)