TY  - JOUR
AU  - Ndubuisi Orji
AU  - Ronald Dixson
C2  - Measurement Science & Technology
DA  - 2007-01-01
LA  - en
M1  - 18
PB  - Measurement Science & Technology
PY  - 2007
TI  - Higher Order Tip Effects in CD-AFM Linewidth Measurements
ER  -