Stavis, S.
, Strychalski, E.
and Gaitan, M.
(2009),
Nanofluidic Structures with Complex Three Dimensional Surfaces, Nanotechnology, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=33163 (Accessed May 5, 2026)
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Nanofluidic Structures with Complex Three Dimensional Surfaces
Published
Author(s)
, Elizabeth Strychalski,
Abstract
A fabrication process was developed to construct nanofluidic devices with complex three dimensional (3D) topographies. A single layer of grayscale photolithography enabled arbitrary and simultaneous control of numerous nanoscale etch depths in a fused silica substrate, and glass wafer bonding was used to form enclosed nanofluidic structures with depths varying from (11 ± 4) nm to (624 ± 7) nm (μ ± σ). Fluorescent nanoparticles and biopolymers were manipulated in a 3D test structure.Citation
Nanotechnology
Issue
20
Pub Type
Journals
Download Paper
Keywords
Nanofluidic, DNA, Single Molecule, Separation, Grayscale, Graytone, Photolithography
Citation
Issues
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Created March 31, 2009, Updated February 19, 2017