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PUBLICATIONS

Atoms join in the race for lithography in the next century

Published

Author(s)

Jabez J. McClelland

Abstract

A news story is presented describing recent experiments on lithography using laser-controlled metastable rare gas atoms.
Citation
Physics World
Volume
11
Issue
8
Pub Type
Journals

Keywords

atom lithography, contamination lithography, laser manipulation of atoms, metastable argon, metastable atoms, sub-100 nm lithography

Citation

McClelland, J. (1998), Atoms join in the race for lithography in the next century, Physics World (Accessed November 13, 2025)

Issues

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Created January 1, 1998, Updated February 19, 2017
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