McClelland, J.
(1998),
Atoms join in the race for lithography in the next century, Physics World, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=620495 (Accessed May 19, 2026)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Atoms join in the race for lithography in the next century
Published
Author(s)
Abstract
A news story is presented describing recent experiments on lithography using laser-controlled metastable rare gas atoms.Citation
Physics World
Volume
11
Issue
8
Pub Type
Journals
Download Paper
Keywords
atom lithography, contamination lithography, laser manipulation of atoms, metastable argon, metastable atoms, sub-100 nm lithography
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact [email protected].
Created January 1, 1998, Updated May 7, 2026