NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.

Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.

U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

Atoms join in the race for lithography in the next century

Published

Author(s)

Jabez J. McClelland

Abstract

A news story is presented describing recent experiments on lithography using laser-controlled metastable rare gas atoms.
Citation
Physics World
Volume
11
Issue
8
Pub Type
Journals

Keywords

atom lithography, contamination lithography, laser manipulation of atoms, metastable argon, metastable atoms, sub-100 nm lithography

Citation

McClelland, J. (1998), Atoms join in the race for lithography in the next century, Physics World (Accessed October 11, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created January 1, 1998, Updated February 19, 2017
Was this page helpful?