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PUBLICATIONS

Embedded Capacitive Displacement Sensor for Nanopositioning Applications

Published

Author(s)

Svetlana Avramov-Zamurovic1, Nicholas Dagalakis, Rae Duk Lee, Yong Sik Kim, Jae M. Yoo, Seung H. Yang

Abstract

The scale of nano objects requires very precise position determination. The state-of-the-art manipulators involve accurate nanometer positioning. This paper presents the design of a capacitive displacement sensor for a nanopositioning application. The challenges of designing a capacitor sensitive to nanometer movements that fits in the area of a few hundred square micrometers are described. Analysis of several different designs was carried out using commercial simulation software. Results suggest a sensing resolution of 10 nm displacement. A sensor prototype was fabricated and tested.
Proceedings Title
Conference on Precision Electromagnetic Measurements 2010
Conference Dates
June 13-18, 2010
Conference Location
Daejeon, KR
Pub Type
Conferences

Download Paper

Local Download

Keywords

Capacitive, Sensor, Embedded, Nanopositioning
Metrology and Manufacturing

Citation

Avramov-Zamurovic1, S. , Dagalakis, N. , Lee, R. , Kim, Y. , Yoo, J. and Yang, S. (2010), Embedded Capacitive Displacement Sensor for Nanopositioning Applications, Conference on Precision Electromagnetic Measurements 2010, Daejeon, KR, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906019 (Accessed November 5, 2025)

Issues

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Created August 16, 2010, Updated October 12, 2021
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