TY  - CONF
AU  - Svetlana Avramov-Zamurovic1
AU  - Nicholas Dagalakis
AU  - Rae Lee
AU  - Yong Kim
AU  - Jae Yoo
AU  - Seung Yang
C2  - Conference on Precision Electromagnetic Measurements 2010, Daejeon, KR
DA  - 2010-08-17 00:08:00
LA  - en
PB  - Conference on Precision Electromagnetic Measurements 2010, Daejeon, KR
PY  - 2010
TI  - Embedded Capacitive Displacement Sensor for Nanopositioning Applications
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906019
ER  -