@conference{831706,
  author = {Svetlana Avramov-Zamurovic1 and Nicholas Dagalakis and Rae Lee and Yong Kim and Jae Yoo and Seung Yang},
  title = {Embedded Capacitive Displacement Sensor for Nanopositioning Applications},
  year = {2010},
  month = {2010-08-17 00:08:00},
  publisher = {Conference on Precision Electromagnetic Measurements 2010, Daejeon, KR},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906019},
  language = {en},
}