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PUBLICATIONS

Test Structure Fundamentals

Published

Author(s)

Richard A. Allen

Abstract

Test structures are critical tools for semiconductor manufacturers, allowing for understanding of the process and individual circuit elements that cannot be acquired from measurements of the circuits, which can have billions of transistors and other circuit elements. Using test structures, the manufacturer can measure parameters such as the dimensions of features and the performance of individual transistors, determine the variability of nominally identical transistors, and project the reliability of the circuit.
Pub Type
Talks
Semiconductors

Citation

Allen, R. (2011), Test Structure Fundamentals (Accessed October 10, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created April 4, 2011, Updated February 19, 2017
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