Foldyna, M.
, Germer, T.
, Bergner, B.
and Dixson, R.
(2010),
Generalized ellipsometry of artificially designed line width roughness, Thin Solid Films, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906239
(Accessed April 26, 2024)
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Generalized ellipsometry of artificially designed line width roughness
Published
Author(s)
, , Brent Bergner,
Abstract
We use azimuthally-resolved spectroscopic Mueller matrix ellipsometry to study a periodic silicon line structure with and without artificially-generated line width roughness (LWR). We model the artificially perturbed grating using 1D and 2D rigorous coupled-wave methods in order to evaluate sensitivity of the experimental spectrally resolved data, measured using a generalized ellipsometer, to the dimensional parameters of LWR. The sensitivity is investigated in the context of multiple conical mounting (azimuth angle) configurations, providing more information about the grating profile.Citation
Thin Solid Films
Volume
519
Pub Type
Journals
Download Paper
Keywords
biperiodic gratings, diffraction gratings, ellipsometry, line width roughness, Mueller matrix, multi-azimuth method, RCWA
Citation
Created December 10, 2010, Updated February 19, 2017