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Transmission Electron Diffraction from nanoparticles, nanowires and thin films in an SEM using conventional EBSD equipment
Published
Author(s)
Roy H. Geiss, Robert R. Keller, David T. Read
Abstract
We describe a new scanning electron microscope (SEM) method for obtaining and analyzing the crystallographic structure and orientation in nanoparticles and ultrathin films using conventional electron backscatter diffraction (EBSD) equipment.
Proceedings Title
Microscopy and Microanalysis 2010 Proceedings
Conference Dates
August 1-5, 2010
Conference Location
Portland, OR
Conference Title
Microscopy and Microanalysis 2010
Pub Type
Conferences
Keywords
EBSD, SEM, nanoparticles, thin films, transmission electron diffraction
Geiss, R.
, Keller, R.
and Read, D.
(2010),
Transmission Electron Diffraction from nanoparticles, nanowires and thin films in an SEM using conventional EBSD equipment, Microscopy and Microanalysis 2010 Proceedings, Portland, OR
(Accessed October 11, 2025)