Design and Fabrication of a Three-DoF MEMS Stage Based on Nested Structures

Published

August 15, 2012

Author(s)

Yong Sik Kim, Nicholas G. Dagalakis, Satyandra K. Gupta

Abstract

This paper presents the design, fabrication and testing of a Micro Electro Mechanical Systems (MEMS) based positioning stage which is capable of generating translational motions along X, Y and Z axes, respectively. For this purpose, two existing 1 Degree of Freedom (DOF) in-plane positioning stages and one existing 1 DOF out-of-plane actuator are merged into one system for 3 DOF motions. The 1 DOF stage has a platform to embed other systems. For a successful combination of three independent systems, two nested structures are adapted as a serial kinematic mechanism. With nested structures, one 1 DOF in-plane positioning stage is embedded into the other 1 DOF in-plane stage for in-plane translational motions along the X and Y axes. And then, one 1 DOF out-of-plane actuator is embedded for the translational motion along the Z axis. The proposed 3 DOF system has demonstrated ability to generate at least 20 μm along X, Y and Z axes, respectively. The cross talk between the three axes is also measured and is less than 4 percent of the intended displacement.

Proceedings Title

ASME 2012 International Design Engineering Technical Conference & Computers and Information in Engineering Conference (IDETC/CIE 2012)

Conference Dates

August 12-15, 2012

Conference Location

Chicago, IL

Pub Type

Conferences

Download Paper

Local Download

Keywords

Nanopositioning, MEMS actuator, 3 DOF

Citation

, Y. , Dagalakis, N. and Gupta, S. (2012), Design and Fabrication of a Three-DoF MEMS Stage Based on Nested Structures, ASME 2012 International Design Engineering Technical Conference & Computers and Information in Engineering Conference (IDETC/CIE 2012) , Chicago, IL, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=911431 (Accessed October 10, 2025)