TY  - CONF
AU  - Yong
AU  - Nicholas Dagalakis
AU  - Satyandra Gupta
C2  - ASME 2012 International Design Engineering Technical Conference & Computers and Information in Engineering Conference (IDETC/CIE 2012)
, Chicago, IL
DA  - 2012-08-15
LA  - en
PB  - ASME 2012 International Design Engineering Technical Conference & Computers and Information in Engineering Conference (IDETC/CIE 2012)
, Chicago, IL
PY  - 2012
TI  - Design and Fabrication of a Three-DoF MEMS Stage Based on Nested Structures
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=911431
ER  -