@conference{34296,
  author = {Yong and Nicholas Dagalakis and Satyandra Gupta},
  title = {Design and Fabrication of a Three-DoF MEMS Stage Based on Nested Structures},
  year = {2012},
  month = {2012-08-15},
  publisher = {ASME 2012 International Design Engineering Technical Conference & Computers and Information in Engineering Conference (IDETC/CIE 2012)
, Chicago, IL},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=911431},
  language = {en},
}