This paper reports in-plane electrostatic comb-drive actuators with stroke as large as 245 µm, achieved by employing a novel Clamped Paired Double Parallelogram (C-DP-DP) flexure mechanism. For a given flexure beam length (L1), comb gap (G), and actuation voltage (V), this is currently the largest comb-drive actuator stroke reported in the literature. The C-DP-DP flexure mechanism design offers high bearing direction stiffness (Kx) while maintaining low motion direction stiffness (Ky), over a large range of motion direction displacement. The resulting high (Kx /Ky) ratio mitigates the on-set of sideways snap-in instability, thereby offering significantly greater actuation stroke compared to existing designs.
Proceedings Title: Proceedings of the Hilton Head 2012: Solid-state Sensors, Actuators and Microsystems Workshop
Conference Dates: June 3-7, 2012
Conference Location: Hilton Head, SC
Pub Type: Conferences
Microelectromechanical systems, MEMS, electrostatic actuator, flexure mechanism, large stroke actuator