Subpixel Image Stitching for Linewidth Measurement Based on Digital Image Correlation

Wei Chu; Joseph Fu; Theodore Vorburger

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PUBLICATIONS

Subpixel Image Stitching for Linewidth Measurement Based on Digital Image Correlation

Published

August 13, 2010

Author(s)

Wei Chu, Joseph Fu, Theodore Vorburger

Citation

Measurement Science & Technology

Volume

Issue

Pub Type

Journals

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Local Download

Nanometrology

Citation

Chu, W. , Fu, J. and Vorburger, T. (2010), Subpixel Image Stitching for Linewidth Measurement Based on Digital Image Correlation, Measurement Science & Technology, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=903899 (Accessed May 20, 2026)

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Created August 13, 2010, Updated May 7, 2026

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