TY - JOUR AU - Chu, Wei AU - Fu, Joseph AU - Vorburger, Theodore C2 - Measurement Science & Technology DA - 2010-08-13 00:08:00 LA - en M1 - 21 PB - Measurement Science & Technology PY - 2010 TI - Subpixel Image Stitching for Linewidth Measurement Based on Digital Image Correlation UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=903899 ER -