@article{1335191, author = {Wei Chu and Joseph Fu and Theodore Vorburger}, title = {Subpixel Image Stitching for Linewidth Measurement Based on Digital Image Correlation}, year = {2010}, number = {21}, month = {2010-08-13 00:08:00}, publisher = {Measurement Science & Technology}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=903899}, language = {en}, }