Design, fabrication, and testing of a serial kinematic MEMS XY stage for multi-finger manipulation

Published

August 29, 2012

Author(s)

Yong Sik Kim, Jae M. Yoo, Seung Ho Yang, Young M. Choi, Nicholas G. Dagalakis, Satyandra K. Gupta

Abstract

In micro-electro-mechanical systems (MEMS) it is difficult to obtain large range of motion with small coupled error. This limitation was overcome by designing and fabricating a nested structure as a serial kinematic mechanism (SKM). In this paper, a MEMS based XY stage is reported for multi-finger manipulation application. The SKM MEMS XY stage is implemented by embedding a single degree-of-freedom (DOF) stage into another single DOF stage. The proposed MEMS XY stage is fabricated by deep reactive ion etching (DRIE) from both sides of a silicon-on-insulator (SOI) wafer. This SKM MEMS stage has a capability to generate more than 50 μm displacements along each X and Y axis. This nested structure also suppressed the coupling motion error to 0.6% of the original actuation displacement. For the demonstration on the micro-particle manipulation, a 15 μm sized polypropylene particle is manipulated and rotated by operating two individual fingers attached to proposed MEMS stages.

Citation

Journal of Micromechanic and Microengineering

Volume

22

Pub Type

Journals

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Keywords

XY-stage, coordinated manipulation, nested structure, a serial kinematic mechanism

Citation

, Y. , Yoo, J. , , S. , Choi, Y. , Dagalakis, N. and Gupta, S. (2012), Design, fabrication, and testing of a serial kinematic MEMS XY stage for multi-finger manipulation, Journal of Micromechanic and Microengineering, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=911710 (Accessed October 8, 2025)