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PUBLICATIONS

Nano- and Atomic-Scale Length Metrology

Published

Author(s)

Theodore V. Vorburger, Ronald G. Dixson, Joseph Fu, Ndubuisi G. Orji, Shaw C. Feng, Michael W. Cresswell, Richard A. Allen, William F. Guthrie, Wei Chu
Proceedings Title
Proc. 5th Int. Conf. on Precision, Meso, Micro, and Nano Engineering (COPEN 2007) (Allied Publishers Pvt. Ltd, Chennai, 2007)
Conference Dates
December 14, 2007
Conference Location
Trivandrum, IN
Conference Title
5th Int. Conf. on Precision, Meso, Micro, and Nano Engineering (COPEN 2007)
Pub Type
Conferences

Download Paper

Local Download
Manufacturing and Metrology

Citation

Vorburger, T. , Dixson, R. , Fu, J. , Orji, N. , Feng, S. , Cresswell, M. , Allen, R. , Guthrie, W. and Chu, W. (2007), Nano- and Atomic-Scale Length Metrology, Proc. 5th Int. Conf. on Precision, Meso, Micro, and Nano Engineering (COPEN 2007) (Allied Publishers Pvt. Ltd, Chennai, 2007), Trivandrum, IN, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=824603 (Accessed October 2, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created December 14, 2007, Updated February 19, 2017
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