TY - CONF AU - Theodore Vorburger AU - Ronald Dixson AU - Joseph Fu AU - Ndubuisi Orji AU - Shaw Feng AU - Michael Cresswell AU - Richard Allen AU - William Guthrie AU - Wei Chu C2 - Proc. 5th Int. Conf. on Precision, Meso, Micro, and Nano Engineering (COPEN 2007) (Allied Publishers Pvt. Ltd, Chennai, 2007), Trivandrum, IN DA - 2007-12-14 LA - en PB - Proc. 5th Int. Conf. on Precision, Meso, Micro, and Nano Engineering (COPEN 2007) (Allied Publishers Pvt. Ltd, Chennai, 2007), Trivandrum, IN PY - 2007 TI - Nano- and Atomic-Scale Length Metrology UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=824603 ER -