@conference{11476,
  author = {Theodore Vorburger and Ronald Dixson and Joseph Fu and Ndubuisi Orji and Shaw Feng and Michael Cresswell and Richard Allen and William Guthrie and Wei Chu},
  title = {Nano- and Atomic-Scale Length Metrology},
  year = {2007},
  month = {2007-12-14},
  publisher = {Proc. 5th Int. Conf. on Precision, Meso, Micro, and Nano Engineering (COPEN 2007) (Allied Publishers Pvt. Ltd, Chennai, 2007), Trivandrum, IN},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=824603},
  language = {en},
}