Newbury, D.
and Ritchie, N.
(1970),
Electron-Excited Energy Dispersive X-ray Spectrometry in the Variable Pressure Scanning Electron Microscope (EDS/VPSEM): It’s Not Microanalysis Anymore!, Proceedings of SPIE
(Accessed October 8, 2025)
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Electron-Excited Energy Dispersive X-ray Spectrometry in the Variable Pressure Scanning Electron Microscope (EDS/VPSEM): Its Not Microanalysis Anymore!
Author(s)
,
Abstract
X-ray spectra measured in the variable-pressure scanning electron microscope (VPSEM, chamber pressure 1 to 2500 Pa) suffer significantly degraded spatial resolution compared to high-vacuum SEM (operating pressure 0.1 mass fraction), minor (0.01≤ C ≤ 0.1), and trace (CCitation
Proceedings of SPIE
Pub Type
Journals
Keywords
scanning electron microscopy, energy dispersive x-ray spectrometry, variable pressure scanning electron microscopy, electron-excited x-ray microanalysis
Citation
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Created May 7, 2017, Updated February 19, 2017